Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10622197 | Plasma processing apparatus and plasma processing method | Shinji Kubota, Koji Koyama, Naoki Matsumoto | 2020-04-14 |
| 10553407 | Plasma processing method and plasma processing apparatus | Koichi Nagami, Kazunobu Fujiwara, Tatsuro Ohshita, Koji Maruyama, Kazuya Nagaseki +1 more | 2020-02-04 |