Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10879086 | Substrate cleaning device, substrate cleaning apparatus, method for manufacturing cleaned substrate and substrate processing apparatus | Takeshi Sakurai, Eiji Hirai, Kaoru Hamaura, Mitsuru Miyazaki | 2020-12-29 |
| 10794342 | Fuel supply device and method for mounting and demounting fuel supply device | Shingo Fukuoka, Rui Adachi, Tetsuro Okazono, Norihiro Hayashi, Atsushi Kamiyama +1 more | 2020-10-06 |
| 10608546 | Power converter | — | 2020-03-31 |
| 10553407 | Plasma processing method and plasma processing apparatus | Koichi Nagami, Kazunobu Fujiwara, Tatsuro Ohshita, Takashi Dokan, Kazuya Nagaseki +1 more | 2020-02-04 |