Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10879086 | Substrate cleaning device, substrate cleaning apparatus, method for manufacturing cleaned substrate and substrate processing apparatus | Eiji Hirai, Kaoru Hamaura, Mitsuru Miyazaki, Koji Maruyama | 2020-12-29 |
| 10840816 | Voltage conversion device | — | 2020-11-17 |