KF

Kazunobu Fujiwara

TL Tokyo Electron Limited: 2 patents #149 of 858Top 20%
Overall (2020): #154,512 of 565,922Top 30%
2
Patents 2020

Issued Patents 2020

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
10615005 Plasma generating method Koichi Nagami, Tadashi Gondai, Norikazu Yamada, Naoyuki Umehara 2020-04-07
10553407 Plasma processing method and plasma processing apparatus Koichi Nagami, Tatsuro Ohshita, Takashi Dokan, Koji Maruyama, Kazuya Nagaseki +1 more 2020-02-04