Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10825663 | Plasma processing apparatus | Shinji Himori, Mitsunori Ohata | 2020-11-03 |
| 10763126 | Etching apparatus and etching method | Koichi Nagami | 2020-09-01 |
| 10553407 | Plasma processing method and plasma processing apparatus | Koichi Nagami, Kazunobu Fujiwara, Tatsuro Ohshita, Takashi Dokan, Koji Maruyama +1 more | 2020-02-04 |