Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10825663 | Plasma processing apparatus | Kazuya Nagaseki, Shinji Himori | 2020-11-03 |
| 10685816 | Method of etching object to be processed | Yoshihiro Umezawa, Jun Sato, Kiyoshi Maeda, Kazuya Matsumoto | 2020-06-16 |
| 10541142 | Maintenance method of plasma processing apparatus | Kazuya Matsumoto, Yuki Hosaka, Takashi Yamamoto | 2020-01-21 |