Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10685816 | Method of etching object to be processed | Yoshihiro Umezawa, Jun Sato, Mitsunori Ohata, Kazuya Matsumoto | 2020-06-16 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10685816 | Method of etching object to be processed | Yoshihiro Umezawa, Jun Sato, Mitsunori Ohata, Kazuya Matsumoto | 2020-06-16 |