Issued Patents 2020
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10763126 | Etching apparatus and etching method | Kazuya Nagaseki | 2020-09-01 |
| 10707053 | Plasma processing method and plasma processing apparatus | Masafumi Urakawa | 2020-07-07 |
| 10615005 | Plasma generating method | Kazunobu Fujiwara, Tadashi Gondai, Norikazu Yamada, Naoyuki Umehara | 2020-04-07 |
| 10593519 | Plasma processing apparatus | Norikazu Yamada, Toshifumi Tachikawa | 2020-03-17 |
| 10553407 | Plasma processing method and plasma processing apparatus | Kazunobu Fujiwara, Tatsuro Ohshita, Takashi Dokan, Koji Maruyama, Kazuya Nagaseki +1 more | 2020-02-04 |