Issued Patents 2020
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10879045 | Plasma processing apparatus | Kazushi Kaneko | 2020-12-29 |
| 10832892 | Antenna, plasma processing device and plasma processing method | Kazuki Takahashi, Yuki KAWADA, Naoki Matsumoto, Takahiro Senda, Shohei Fukano +3 more | 2020-11-10 |
| 10825658 | Antenna and plasma processing apparatus | Yuki KAWADA | 2020-11-03 |
| 10619267 | Diamond substrate | Hideo Aida, Kenjiro IKEJIRI, Seongwoo Kim | 2020-04-14 |
| 10622197 | Plasma processing apparatus and plasma processing method | Shinji Kubota, Takashi Dokan, Naoki Matsumoto | 2020-04-14 |
| 10553402 | Antenna device and plasma processing apparatus | Yuki KAWADA, Naoki Matsumoto, Ayako Ito, Takahiro Senda | 2020-02-04 |