Issued Patents 2020
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10879045 | Plasma processing apparatus | Koji Koyama | 2020-12-29 |
| 10847353 | Pulse monitor device and plasma processing apparatus | Yukinori Hanada | 2020-11-24 |
| 10796886 | Detection device, microwave output device and plasma processing apparatus | Yohei Ishida | 2020-10-06 |
| 10748746 | Microwave output device and plasma processing apparatus | Yukinori Hanada | 2020-08-18 |
| 10679826 | Microwave control method | Jun Yoshikawa, Naoki Matsumoto | 2020-06-09 |
| 10662531 | Plasma processing apparatus, abnormality determination method, and microwave generator | Yunosuke Hashimoto, Yohei Ishida | 2020-05-26 |