Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10847353 | Pulse monitor device and plasma processing apparatus | Kazushi Kaneko | 2020-11-24 |
| 10748746 | Microwave output device and plasma processing apparatus | Kazushi Kaneko | 2020-08-18 |