Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10796886 | Detection device, microwave output device and plasma processing apparatus | Kazushi Kaneko | 2020-10-06 |
| 10662531 | Plasma processing apparatus, abnormality determination method, and microwave generator | Kazushi Kaneko, Yunosuke Hashimoto | 2020-05-26 |