Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10832892 | Antenna, plasma processing device and plasma processing method | Kazuki Takahashi, Naoki Matsumoto, Takahiro Senda, Koji Koyama, Shohei Fukano +3 more | 2020-11-10 |
| 10825658 | Antenna and plasma processing apparatus | Koji Koyama | 2020-11-03 |
| 10553402 | Antenna device and plasma processing apparatus | Naoki Matsumoto, Koji Koyama, Ayako Ito, Takahiro Senda | 2020-02-04 |