Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10832892 | Antenna, plasma processing device and plasma processing method | Kazuki Takahashi, Yuki KAWADA, Naoki Matsumoto, Koji Koyama, Shohei Fukano +3 more | 2020-11-10 |
| 10553402 | Antenna device and plasma processing apparatus | Yuki KAWADA, Naoki Matsumoto, Koji Koyama, Ayako Ito | 2020-02-04 |