Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10553402 | Antenna device and plasma processing apparatus | Yuki KAWADA, Naoki Matsumoto, Koji Koyama, Takahiro Senda | 2020-02-04 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10553402 | Antenna device and plasma processing apparatus | Yuki KAWADA, Naoki Matsumoto, Koji Koyama, Takahiro Senda | 2020-02-04 |