Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10763087 | Plasma processing apparatus | Shuichi Takahashi, Takaharu MIYADATE, Norinao TAKASU, Akihiro Yokota, Naohiko Okunishi | 2020-09-01 |
| 10699935 | Semiconductor manufacturing device and processing method | Shinji Himori, Yoshiyuki Kobayashi, Takehiro Kato | 2020-06-30 |
| 10651012 | Substrate processing method | Akihiro Yokota, Shinji Himori | 2020-05-12 |