Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10763087 | Plasma processing apparatus | Shuichi Takahashi, Takaharu MIYADATE, Norinao TAKASU, Etsuji Ito, Akihiro Yokota | 2020-09-01 |
| 10665416 | Substrate processing apparatus | Shinji Kubota, Yosuke Tamuro, Shota Kaneko | 2020-05-26 |
| 10651813 | Method for designing filter | Nozomu Nagashima, Eiichiro Kikuchi | 2020-05-12 |
| 10546723 | Plasma processing method | Akihiro Yokota, Takanori BANSE, Joji TAKAYOSHI, Shinya Morikita | 2020-01-28 |