Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10763087 | Plasma processing apparatus | Shuichi Takahashi, Takaharu MIYADATE, Norinao TAKASU, Etsuji Ito, Naohiko Okunishi | 2020-09-01 |
| 10651012 | Substrate processing method | Etsuji Ito, Shinji Himori | 2020-05-12 |
| 10546723 | Plasma processing method | Takanori BANSE, Joji TAKAYOSHI, Shinya Morikita, Naohiko Okunishi | 2020-01-28 |