Issued Patents 2020
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10825662 | Method for driving member and processing apparatus | Rumiko MORIYA, Suguru Sato, Yuuji AKIDUKI, Takehiro Tanikawa | 2020-11-03 |
| 10770268 | Plasma processing method and plasma processing apparatus | Shinya Morikita, Takahisa Iwasaki, Ryosuke Niitsuma, Hiroki Taoka | 2020-09-08 |
| 10707088 | Method of processing target object | Shinya Morikita, Yuta Seya, Ryosuke Niitsuma | 2020-07-07 |
| 10692726 | Method for processing workpiece | Shinya Morikita, Yuta Seya, Ryosuke Niitsuma | 2020-06-23 |
| 10546723 | Plasma processing method | Akihiro Yokota, Joji TAKAYOSHI, Shinya Morikita, Naohiko Okunishi | 2020-01-28 |