Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10770268 | Plasma processing method and plasma processing apparatus | Shinya Morikita, Takanori BANSE, Takahisa Iwasaki, Hiroki Taoka | 2020-09-08 |
| 10707088 | Method of processing target object | Shinya Morikita, Takanori BANSE, Yuta Seya | 2020-07-07 |
| 10692726 | Method for processing workpiece | Shinya Morikita, Takanori BANSE, Yuta Seya | 2020-06-23 |
| D877079 | Electrode plate for plasma processing apparatus | Shinichi Kozuka, Manabu Ishikawa | 2020-03-03 |