Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10861675 | Plasma processing apparatus and plasma processing method | Takao FUNAKUBO, Hirofumi Haga, Wataru Ozawa, Akihiro Sakamoto, Naoki Taniguchi +2 more | 2020-12-08 |
| D877079 | Electrode plate for plasma processing apparatus | Ryosuke Niitsuma, Manabu Ishikawa | 2020-03-03 |