Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10861675 | Plasma processing apparatus and plasma processing method | Hirofumi Haga, Shinichi Kozuka, Wataru Ozawa, Akihiro Sakamoto, Naoki Taniguchi +2 more | 2020-12-08 |
| 10734204 | Method for cleaning components of plasma processing apparatus | Ryuichi Asako | 2020-08-04 |
| 10626497 | Method for cleaning components of plasma processing apparatus | Ryuichi Asako | 2020-04-21 |