Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10861675 | Plasma processing apparatus and plasma processing method | Takao FUNAKUBO, Hirofumi Haga, Shinichi Kozuka, Akihiro Sakamoto, Naoki Taniguchi +2 more | 2020-12-08 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10861675 | Plasma processing apparatus and plasma processing method | Takao FUNAKUBO, Hirofumi Haga, Shinichi Kozuka, Akihiro Sakamoto, Naoki Taniguchi +2 more | 2020-12-08 |