Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10777425 | Method of processing substrate | Masahiro Tabata, Toru Hisamatsu, Sho Kumakura, Shinya Ishikawa, Masanobu Honda | 2020-09-15 |
| 10734204 | Method for cleaning components of plasma processing apparatus | Takao FUNAKUBO | 2020-08-04 |
| 10626497 | Method for cleaning components of plasma processing apparatus | Takao FUNAKUBO | 2020-04-21 |