Issued Patents 2020
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10777422 | Method for processing target object | Yoshihide Kihara, Toru Hisamatsu | 2020-09-15 |
| 10777425 | Method of processing substrate | Masahiro Tabata, Toru Hisamatsu, Sho Kumakura, Ryuichi Asako, Shinya Ishikawa | 2020-09-15 |
| 10651044 | Processing method and plasma processing apparatus | Michiko Nakaya | 2020-05-12 |
| 10586710 | Etching method | Maju TOMURA, Yoshihide Kihara | 2020-03-10 |
| 10541147 | Etching method | Masahiro Tabata, Takayuki Katsunuma | 2020-01-21 |