Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10707091 | Plasma etching method and plasma etching apparatus | Keiji Kitagaito, Fumiya Kobayashi | 2020-07-07 |
| 10692729 | Etching process method | Jin Kudo, Wataru TAKAYAMA | 2020-06-23 |
| 10600654 | Etching process method | Jin Kudo, Yoshinobu Ohya | 2020-03-24 |
| 10586710 | Etching method | Yoshihide Kihara, Masanobu Honda | 2020-03-10 |