Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10714320 | Plasma processing method including cleaning of inside of chamber main body of plasma processing apparatus | Taku Gohira | 2020-07-14 |
| 10692729 | Etching process method | Wataru TAKAYAMA, Maju TOMURA | 2020-06-23 |
| 10600654 | Etching process method | Maju TOMURA, Yoshinobu Ohya | 2020-03-24 |