Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10811275 | Plasma etching method and plasma etching apparatus | Yuya Minoura | 2020-10-20 |
| 10714320 | Plasma processing method including cleaning of inside of chamber main body of plasma processing apparatus | Jin Kudo | 2020-07-14 |
| 10714370 | Mounting table and plasma processing apparatus | Taketoshi TOMIOKA, Toshiyuki MAKABE | 2020-07-14 |