Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10867777 | Plasma processing method and plasma processing apparatus | Muneyuki Omi, Rei Ibuka, Dai Igarashi, Takayuki Suzuki, Takahiro Murakami | 2020-12-15 |
| 10707090 | Plasma etching method | Sho Tominaga, Yoshiki Igarashi | 2020-07-07 |
| 10692729 | Etching process method | Jin Kudo, Maju TOMURA | 2020-06-23 |