Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10867777 | Plasma processing method and plasma processing apparatus | Wataru TAKAYAMA, Rei Ibuka, Dai Igarashi, Takayuki Suzuki, Takahiro Murakami | 2020-12-15 |
| 10784088 | Plasma processing method | Dai Igarashi, Rei Ibuka, Takahiro Murakami | 2020-09-22 |