Issued Patents 2020
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10777425 | Method of processing substrate | Masahiro Tabata, Sho Kumakura, Ryuichi Asako, Shinya Ishikawa, Masanobu Honda | 2020-09-15 |
| 10777422 | Method for processing target object | Yoshihide Kihara, Masanobu Honda | 2020-09-15 |
| 10763123 | Method for processing workpiece | Yoshihide Kihara | 2020-09-01 |
| 10714340 | Method for processing workpiece | Yoshihide Kihara, Tomoyuki Oishi | 2020-07-14 |
| 10707100 | Processing method and plasma processing apparatus | Masahiro Tabata | 2020-07-07 |
| 10559472 | Workpiece processing method | Masahiro Tabata, Yoshihide Kihara | 2020-02-11 |
| 10553446 | Method of processing target object | Yoshihide Kihara, Masahiro Tabata | 2020-02-04 |