Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10854430 | Plasma etching method | — | 2020-12-01 |
| 10854470 | Plasma etching method | — | 2020-12-01 |
| 10811274 | Etching method and plasma processing apparatus | — | 2020-10-20 |
| 10541147 | Etching method | Masahiro Tabata, Masanobu Honda | 2020-01-21 |