Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10651813 | Method for designing filter | Nozomu Nagashima, Naohiko Okunishi | 2020-05-12 |
| 10541158 | Temperature adjustment method using wet surface in a processing chamber | Yasuharu Sasaki, Kazuyoshi Matsuzaki | 2020-01-21 |