Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10734221 | Method of manufacturing semiconductor device and method of forming metal oxide film | Taiki KATO, Hisashi Higuchi, Kosuke Yamamoto, Ayuta Suzuki, Yuji SESHIMO +2 more | 2020-08-04 |
| 10643839 | Film forming apparatus and film forming method | Ayuta Suzuki, Kosuke Yamamoto, Munehito KAGAYA, Tsuyoshi Moriya, Tadashi MITSUNARI +1 more | 2020-05-05 |
| 10591194 | Temperature control method | Yasuharu Sasaki | 2020-03-17 |
| 10541158 | Temperature adjustment method using wet surface in a processing chamber | Yasuharu Sasaki, Eiichiro Kikuchi | 2020-01-21 |