Issued Patents 2020
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10879050 | Plasma processing apparatus, electrostatic attraction method, and electrostatic attraction program | Shoichiro Matsuyama, Naoki Tamaru | 2020-12-29 |
| 10832930 | Electrostatic attraction method | Katsunori Hirai | 2020-11-10 |
| 10825709 | Electrostatic chucking method and substrate processing apparatus | Taketoshi TOMIOKA, Hiroki Kishi, Jisoo SUH | 2020-11-03 |
| 10591194 | Temperature control method | Kazuyoshi Matsuzaki | 2020-03-17 |
| 10541158 | Temperature adjustment method using wet surface in a processing chamber | Eiichiro Kikuchi, Kazuyoshi Matsuzaki | 2020-01-21 |