SM

Shoichiro Matsuyama

TL Tokyo Electron Limited: 1 patents #306 of 858Top 40%
📍 Rifu, JP: #128 of 313 inventorsTop 45%
Overall (2020): #275,069 of 565,922Top 50%
1
Patents 2020

Issued Patents 2020

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
10879050 Plasma processing apparatus, electrostatic attraction method, and electrostatic attraction program Naoki Tamaru, Yasuharu Sasaki 2020-12-29