Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10825709 | Electrostatic chucking method and substrate processing apparatus | Yasuharu Sasaki, Taketoshi TOMIOKA, Jisoo SUH | 2020-11-03 |
| 10755902 | Plasma processing apparatus and focus ring | Jisoo SUH | 2020-08-25 |