Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10847348 | Plasma processing apparatus and plasma processing method | Toshiya Tsukahara, Shuhei Yamabe, Kota Yachi, Tetsuji Sato, Yohei Uchida +3 more | 2020-11-24 |
| 10734221 | Method of manufacturing semiconductor device and method of forming metal oxide film | Taiki KATO, Hisashi Higuchi, Kosuke Yamamoto, Kazuyoshi Matsuzaki, Yuji SESHIMO +2 more | 2020-08-04 |
| 10643839 | Film forming apparatus and film forming method | Kosuke Yamamoto, Kazuyoshi Matsuzaki, Munehito KAGAYA, Tsuyoshi Moriya, Tadashi MITSUNARI +1 more | 2020-05-05 |