Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10865368 | Rinse agent composition for silicon wafers | — | 2020-12-15 |
| 10847348 | Plasma processing apparatus and plasma processing method | Toshiya Tsukahara, Shuhei Yamabe, Kota Yachi, Tetsuji Sato, Ayuta Suzuki +3 more | 2020-11-24 |