Issued Patents 2020
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10770316 | Substrate liquid processing apparatus, substrate liquid processing method and recording medium | Kazuki Kosai, Yoshihiro Kai, Hiroshi Komiya, Seiya Fujimoto, Takahisa Otsuka | 2020-09-08 |
| 10692739 | Substrate processing apparatus | Yosuke Kawabuchi, Keisuke Egashira, Hiroki Ohno, Hiroshi Marumoto, Takuro Masuzumi +2 more | 2020-06-23 |
| 10619922 | Substrate processing apparatus, substrate processing method, and storage medium | Hiromi Kiyose, Satoshi Biwa | 2020-04-14 |
| 10576493 | Substrate processing apparatus and substrate processing method | Keisuke Egashira, Hiroshi Marumoto, Kento Tsukano | 2020-03-03 |
| 10566182 | Substrate processing apparatus, substrate processing method, and storage medium | Keisuke Egashira | 2020-02-18 |