Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10770316 | Substrate liquid processing apparatus, substrate liquid processing method and recording medium | Kazuki Kosai, Yoshihiro Kai, Gentaro Goshi, Hiroshi Komiya, Seiya Fujimoto | 2020-09-08 |
| 10685858 | Substrate processing method and substrate processing apparatus | Hiroyuki Higashi, Kazuyoshi Shinohara, Takashi Nakazawa, Seiya Fujimoto, Yuichi Douki | 2020-06-16 |