Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10770316 | Substrate liquid processing apparatus, substrate liquid processing method and recording medium | Kazuki Kosai, Yoshihiro Kai, Gentaro Goshi, Seiya Fujimoto, Takahisa Otsuka | 2020-09-08 |
| 10591935 | Substrate liquid processing apparatus and substrate liquid processing method | Yasuhiro Takaki, Chikara Nobukuni, Keigo Satake, Atsushi Anamoto | 2020-03-17 |
| 10573539 | Substrate liquid processing apparatus | Yasuhiro Takaki, Shinichi Umeno, Koji Tanaka, Takami Satoh, Atsushi Anamoto | 2020-02-25 |