Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10714365 | Liquid processing apparatus | Tetsurou Iriyama, Shinichi Umeno, Takami Satoh | 2020-07-14 |
| 10591935 | Substrate liquid processing apparatus and substrate liquid processing method | Hiroshi Komiya, Chikara Nobukuni, Keigo Satake, Atsushi Anamoto | 2020-03-17 |
| 10573539 | Substrate liquid processing apparatus | Hiroshi Komiya, Shinichi Umeno, Koji Tanaka, Takami Satoh, Atsushi Anamoto | 2020-02-25 |