Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10714365 | Liquid processing apparatus | Tetsurou Iriyama, Shinichi Umeno, Yasuhiro Takaki | 2020-07-14 |
| 10573539 | Substrate liquid processing apparatus | Hiroshi Komiya, Yasuhiro Takaki, Shinichi Umeno, Koji Tanaka, Atsushi Anamoto | 2020-02-25 |