Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10591935 | Substrate liquid processing apparatus and substrate liquid processing method | Yasuhiro Takaki, Hiroshi Komiya, Chikara Nobukuni, Keigo Satake | 2020-03-17 |
| 10573539 | Substrate liquid processing apparatus | Hiroshi Komiya, Yasuhiro Takaki, Shinichi Umeno, Koji Tanaka, Takami Satoh | 2020-02-25 |