Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10871171 | Centrifugal fan design to decrease noise and slim down the fan | Kiyohisa Nara | 2020-12-22 |
| 10770316 | Substrate liquid processing apparatus, substrate liquid processing method and recording medium | Kazuki Kosai, Yoshihiro Kai, Gentaro Goshi, Hiroshi Komiya, Takahisa Otsuka | 2020-09-08 |
| 10685858 | Substrate processing method and substrate processing apparatus | Hiroyuki Higashi, Takahisa Otsuka, Kazuyoshi Shinohara, Takashi Nakazawa, Yuichi Douki | 2020-06-16 |