Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10832902 | Substrate processing apparatus and substrate processing method | Yoshinori Ikeda, Yuki Taniguchi | 2020-11-10 |
| 10685858 | Substrate processing method and substrate processing apparatus | Hiroyuki Higashi, Takahisa Otsuka, Takashi Nakazawa, Seiya Fujimoto, Yuichi Douki | 2020-06-16 |