Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10865861 | Electric actuator | Takushi Matsuto, Yuuki NAITOU | 2020-12-15 |
| 10830320 | Electric actuator | Takushi Matsuto, Yuuki NAITOU | 2020-11-10 |
| 10832902 | Substrate processing apparatus and substrate processing method | Yuki Taniguchi, Kazuyoshi Shinohara | 2020-11-10 |
| 10731739 | Electric actuator | Takushi Matsuto, Yuuki NAITOU | 2020-08-04 |