Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10851468 | Substrate processing apparatus and substrate processing method | Tadashi Iino, Toru Ihara, Yoichi Tokunaga | 2020-12-01 |
| 10770316 | Substrate liquid processing apparatus, substrate liquid processing method and recording medium | Kazuki Kosai, Gentaro Goshi, Hiroshi Komiya, Seiya Fujimoto, Takahisa Otsuka | 2020-09-08 |
| 10700166 | Nozzle cleaning device, nozzle cleaning method, and substrate processing apparatus | Shinya Ishikawa, Yuji Kamikawa, Shuichi Nagamine, Naoki Shindo | 2020-06-30 |