Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10700166 | Nozzle cleaning device, nozzle cleaning method, and substrate processing apparatus | Yoshihiro Kai, Shinya Ishikawa, Shuichi Nagamine, Naoki Shindo | 2020-06-30 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10700166 | Nozzle cleaning device, nozzle cleaning method, and substrate processing apparatus | Yoshihiro Kai, Shinya Ishikawa, Shuichi Nagamine, Naoki Shindo | 2020-06-30 |